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Article 2020

Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection

Author(s): Hofmann, Siegfried and Lejcek, Pavel and Zhou, Gang and Yang, Hao and Lian, SongYou and Kovac, Janez and Wang, JiangYong
Journal: Journal of Vacuum Science and Technology B
Volume: 38
Number (issue): 3
Year: 2020
Publisher: Published by AVS through the American Institute of Physics
BibTeX Type: Article (article)
DOI: 10.1116/6.0000108
Address: New York
Electronic Archiving: grant_archive
Language: eng

BibTeX 

@article{escidoc:3274441,
  title = {Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection},
  journal = {Journal of Vacuum Science and Technology B},
  volume = {38},
  number = {3},
  publisher = {Published by AVS through the American Institute of Physics},
  address = {New York},
  year = {2020},
  author = {Hofmann, Siegfried and Lejcek, Pavel and Zhou, Gang and Yang, Hao and Lian, SongYou and Kovac, Janez and Wang, JiangYong},
  doi = {10.1116/6.0000108}
}