Modern Magnetic Systems
Article
2015
Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing
| Author(s): | Keskinbora, K. and Grévent, C. and Hirscher, M. and Weigand, M. and Schütz, G. |
| Journal: | {Advanced Optical Materials} |
| Volume: | 3 |
| Pages: | 792--800 |
| Year: | 2015 |
| Publisher: | WILEY-VCH Verlag GmbH Co. KGaA |
| BibTeX Type: | Article (article) |
| DOI: | 10.1002/adom.201400411 |
| Address: | Weinheim |
| Electronic Archiving: | grant_archive |
| Language: | eng |
BibTeX
@article{escidoc:0146,
title = {{Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing}},
journal = {{Advanced Optical Materials}},
volume = {3},
pages = {792--800},
publisher = {WILEY-VCH Verlag GmbH Co. KGaA},
address = {Weinheim},
year = {2015},
author = {Keskinbora, K. and Gr\'event, C. and Hirscher, M. and Weigand, M. and Sch\"utz, G.},
doi = {10.1002/adom.201400411}
}