Micro, Nano, and Molecular Systems
Article
2014
Shape control in wafer-based aperiodic 3D nanostructures
Micro, Nano, and Molecular Systems
PostDoc, then Assistant Professor in Physics at Northern Arizona University, USA.
Micro, Nano, and Molecular Systems
PostDoc, Petzow Prize winner (2015), now Manager of Optical Engineering at Metamaterial Technologies Inc. (MTI), Nova Scotia, Canada.
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate. <p>Cover article.<p>
| Author(s): | Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer |
| Journal: | NANOTECHNOLOGY |
| Volume: | 25 |
| Number (issue): | 23 |
| Year: | 2014 |
| Bibtex Type: | Article (article) |
| DOI: | 10.1088/0957-4484/25/23/235302 |
| Electronic Archiving: | grant_archive |
| Note: | Cover article. |
BibTex
@article{ISI:000336958900005,
title = {Shape control in wafer-based aperiodic 3D nanostructures},
journal = {NANOTECHNOLOGY},
abstract = {Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.
<p>Cover article.<p>},
volume = {25},
number = {23},
year = {2014},
note = {Cover article.},
slug = {isi-000336958900005},
author = {Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer}
}