Physical Intelligence
Modern Magnetic Systems
Article
2021
Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers
| Author(s): | Dogan, Gül and Demir, Sinan O. and Gutzler, Rico and Gruhn, Herbert and Dayan, Cem B. and Sanli, Umut T. and Silber, Christian and Culha, Utku and Sitti, Metin and Schütz, Gisela and Grévent, Corinne and Keskinbora, Kahraman |
| Journal: | ACS Applied Materials and Interfaces |
| Volume: | 13 |
| Number (issue): | 45 |
| Pages: | 54503--54515 |
| Year: | 2021 |
| Publisher: | American Chemical Society |
| Bibtex Type: | Article (article) |
| DOI: | 10.1021/acsami.1c14586 |
| Address: | Washington, DC |
| Electronic Archiving: | grant_archive |
| Language: | eng |
BibTex
@article{doi:10.1021/acsami.1c14586,
title = {Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers},
journal = {ACS Applied Materials and Interfaces},
volume = {13},
number = {45},
pages = {54503--54515},
publisher = {American Chemical Society},
address = {Washington, DC},
year = {2021},
slug = {doi-10-1021-acsami-1c14586},
author = {Dogan, G{\"u}l and Demir, Sinan O. and Gutzler, Rico and Gruhn, Herbert and Dayan, Cem B. and Sanli, Umut T. and Silber, Christian and Culha, Utku and Sitti, Metin and Sch{\"u}tz, Gisela and Grévent, Corinne and Keskinbora, Kahraman}
}