Flexible Ferroelectret Field-Effect Transistor for Large-Area Sensor Skins and Microphones
Ferroelectrets generate an electric field large enough to modulate the conductance of the source-drain channel of a thin-film field-effect transistor. Integrating a ferroelectret with a thin-film transistor produces a ferroelectret field-effect transistor. The authors made such transistors by laminating cellular polypropylene films and amorphous silicon thin-film transistors on polyimide substrates. They show that these ferrroelectret field-effect transistors respond in a static capacitive or dynamic piezoelectric mode. A touch sensor, a pressure-activated switch, and a microphone are demonstrated. The structure can be scaled up to large-area flexible transducer arrays, such as roll-up steerable compliant sensor skin.
Author(s): | Ingrid Graz and Martin Kaltenbrunner and Christoph Keplinger and Reinhard Schwödiauer and Siegfried Bauer and Stéphanie P. Lacour and Sigurd Wagner |
Journal: | Applied Physics Letters |
Volume: | 89 |
Number (issue): | 7 |
Pages: | 073501 |
Year: | 2006 |
Month: | August |
Bibtex Type: | Article (article) |
DOI: | 10.1063/1.2335838 |
State: | Published |
Electronic Archiving: | grant_archive |
BibTex
@article{Keplinger06-APL-Ferroelectret, title = {Flexible Ferroelectret Field-Effect Transistor for Large-Area Sensor Skins and Microphones}, journal = {Applied Physics Letters}, abstract = {Ferroelectrets generate an electric field large enough to modulate the conductance of the source-drain channel of a thin-film field-effect transistor. Integrating a ferroelectret with a thin-film transistor produces a ferroelectret field-effect transistor. The authors made such transistors by laminating cellular polypropylene films and amorphous silicon thin-film transistors on polyimide substrates. They show that these ferrroelectret field-effect transistors respond in a static capacitive or dynamic piezoelectric mode. A touch sensor, a pressure-activated switch, and a microphone are demonstrated. The structure can be scaled up to large-area flexible transducer arrays, such as roll-up steerable compliant sensor skin.}, volume = {89}, number = {7}, pages = {073501}, month = aug, year = {2006}, slug = {keplinger06-apl-ferroelectret}, author = {Graz, Ingrid and Kaltenbrunner, Martin and Keplinger, Christoph and Schw{\"o}diauer, Reinhard and Bauer, Siegfried and Lacour, Stéphanie P. and Wagner, Sigurd}, month_numeric = {8} }