@article{doi:10.1021/acsami.1c14586,
  title = {Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers},
  journal = {ACS Applied Materials and Interfaces},
  volume = {13},
  number = {45},
  pages = {54503--54515},
  publisher = {American Chemical Society},
  address = {Washington, DC},
  year = {2021},
  author = {Dogan, G{\"u}l and Demir, Sinan O. and Gutzler, Rico and Gruhn, Herbert and Dayan, Cem B. and Sanli, Umut T. and Silber, Christian and Culha, Utku and Sitti, Metin and Sch{\"u}tz, Gisela and Grévent, Corinne and Keskinbora, Kahraman},
  doi = {10.1021/acsami.1c14586}
}