@article{escidoc:3257727,
  title = {In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films},
  journal = {ACS Applied Materials and Interfaces},
  volume = {12},
  number = {29},
  pages = {33377--33385},
  publisher = {American Chemical Society},
  address = {Washington, DC},
  year = {2020},
  author = {Dogan, G. and Sanli, U. T. and Hahn, K. and M{\"u}ller, L. and Gruhn, H. and Silber, C. and Sch{\"u}tz, G. and Gr\'event, C. and Keskinbora, K.},
  doi = {10.1021/acsami.0c06873}
}