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Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography

2019

Book

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Author(s): Keskinbora, K.
Volume: SL48
Pages: 46
Year: 2019
Series: {SPIE.Spotlight}
Publisher: SPIE Press

Department(s): Modern Magnetic Systems
Bibtex Type: Book (book)

Address: Bellingham, WA
DOI: 10.1117/3.2531118
Language: eng
State: Published

BibTex

@book{escidoc:3060647,
  title = {{Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography}},
  author = {Keskinbora, K.},
  volume = {SL48},
  pages = {46},
  series = {{SPIE.Spotlight}},
  publisher = {SPIE Press},
  address = {Bellingham, WA},
  year = {2019},
  doi = {10.1117/3.2531118}
}