@article{escidoc:4123478, title = {A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching}, author = {Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B.}, journal = {Ultramicroscopy}, volume = {171}, pages = {82-88}, year = {2016}, doi = {10.1016/j.ultramic.2016.09.004} }