@phdthesis{escidoc:0116, title = {{Ion beam lithographic and multilayer Fresnel zone plates for soft and hard X-rays: Nanofabrication and characterization}}, author = {Keskinbora, K.}, school = {Universit\"at Stuttgart}, address = {Stuttgart}, year = {2015}, doi = {10.18419/opus-8812}, url = {http://elib.uni-stuttgart.de/handle/11682/8829} }